The Semiconductor industry is the core of the modern electronics industry and the Semiconductor industry is based on the silicon material industry, according to the project. Although a variety of new List of semiconductor materials are emerging, more than 90% of semiconductor devices and circuits, very-large-scale integration, in particular, is made on high purity, high-quality silicon wafers, and epitaxial wafers. The importance of wafer cleaning to the semiconductor industry has been paid much attention since the early 1950s because the contamination on the surface of the silicon wafer can seriously affect the performance, reliability, and yield of devices. With the rapid development of microelectronic technology and the improvement of People’s demand for raw materials, the influence of pollutants on devices has become more and more prominent